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[Editor's Pick] Current Optics and Photonics Vol. 9 no. 3 (2025 Jun)_1st

사무국 hit 106 date 2025-06-25

MEMS Actuators for Tunable Waveguide Devices in Photonic Integrated Circuits: A Brief Review

Dongju Choi, Young Jae Park, Man Jae Her, and Sangyoon Han*

 

Current Optics and Photonics  Vol. 9 No. 3 (2025 June), pp. 185-195
DOI: https://doi.org/10.3807/COPP.2025.9.3.185

 


Fig. 1  Schematic illustration of microelectromechanical systems (MEMS)-based optical phase shifters using mecha nically movable waveguides: (a) 3D schematic depicting two parallel waveguides (main and pertur­bing waveguides), where the perturbing waveguide can move either horizontally (inplane actuation) or vertically (out-of-plane actuation). Top of (b) and left-side of (c) are optical mode profiles with distant waveguides for in-plane and vertical configurations. Bottom of (b) and right-side of (c) are optical mode profiles showing significant mode expansion when waveguides are brought closer in both in-plane and vertical directions.

 

Keywords: Actuator, Microelectromechanical systems, Photonic integrated circuits, Waveguide
OCIS codes: (230.0230) Optical devices; (230.4685) Optical microelectromechanical devices; (230.7370) Waveguides; (250.5300) Photonic integrated circuits;


Abstract
Microelectromechanical systems (MEMS)-based tuning methods offer promising solutions for dynamically controlling optical properties in photonic integrated circuits (PICs) to address the limitations associated with traditional approaches that rely on direct modulation of the material’s refractive index. Conventional methods such as thermo-optic, plasma dispersion, and electro-optic modulation, face significant challenges including high energy consumption, limited refractive index change, and issues with heat dissipation and optical losses. By contrast, MEMS-based actuators directly reposition optical components, enabling reduced device footprints, negligible static power consumption, rapid response times, and improved reliability. This paper systematically explores the operating principles and design characteristics of five representative MEMS actuator technologies widely used in tunable waveguide devices: In-plane comb-drive actuators, cantilever actuators, gap-reducing actuators, vertical digital actuators, and vertical comb-drive actuators. Each actuator type is analyzed for its distinct advantages and challenges, with considerations such as device compactness, switching speed, voltage requirements, and robustness against reliability issues such as pull-in phenomena and stiction. The insights presented emphasize the substantial potential of MEMS-based tuning methods to advance the scalability, energy efficiency, and performance of next-generation PICs. Continued research into improving actuator performance, including increased operation speed, lower operating voltages, and further miniaturization, will be critical to achieving widespread integration and adoption.

 

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