Poster Sessions
Optics and Photonics Congress 2021 (OPC 2021)
Sunday-Wednesday, July 4-7, 2021; 제주 국제컨벤션센터 (ICC Jeju)
Session TP-IX-: 리소그래피
3:50 PM-4:50 PM, Tuesday, July 06, 2021
Room: Poster Session
Chair:
Abstract: TP-IX-01 : 분광타원계, 분광반사계, 분광투과계가 결합된 장비의 자동화 및 통합 운용을 통한 사용자 편의성과 측정분석 정밀도 향상
Presenter:
Kim Seongju Andrew
(Technical Sales Div, Ellipso Technology Co., Ltd.)
Author:
KIM Sang Youl *4, KIM Seongju Andrew2, LEE Minho 1, IN SunJa 3, JO Seongyong 3, LEE Yonggu 1, HONG Junseon 3
(1Production Technology Div., Ellipso Technology Co., Ltd., 2Technical Sales Div, Ellipso Technology Co., Ltd., 3R&D Div., Ellipso Technology Co., Ltd., 4Dept. of Physics, Ajou University)